Large-area fabrication of stochastic nano-structures on polymer webs by ion-and plasma treatment

Schönberger, W.W.SchönbergerGerlach, G.G.GerlachFahland, M.M.FahlandMunzert, P.P.MunzertSchulz, U.U.Schulz2022-03-112022-03-112010https://publica.fraunhofer.de/handle/publica/366424ennanostructurereel-to-reelplasma treatmentanti-reflection coatingion source620667670Large-area fabrication of stochastic nano-structures on polymer webs by ion-and plasma treatmentconference paper