Kreutz, E.W.E.W.KreutzPoprawe, R.R.PopraweLoosen, P.P.LoosenHoffmann, D.D.Hoffmann2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/342537Diode-pumped solid-state lasers are not only beginning to substitute the established laser sources like CO2 and lamp-pumped Nd:YAG lasers, which lead to new Laser applications because of their high beam quality and efficiency, compactness and MTBF times of more than 10,000 h of operation. Beside the commercially available diode-pumped rod laser sources, there is much effort taken into investigations to bring new generations of lasers based on slab and disk design to the status of an industrial tool for applications. Examples for new laser processes based on these laser sources are rapid manufacturing by selective laser melting, high-power surface cleaning, and generation of extreme ultraviolet (EUV) light.en621conference paper