Technology dependent design and characterization of silicon vibration sensors with linear tunable band selectivity

Shaporin, A.A.ShaporinForke, R.R.ForkeDienel, M.M.DienelNaumann, M.M.NaumannScheibner, D.D.ScheibnerDötzel, W.W.DötzelMehner, J.J.Mehner2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/361293enTechnology dependent design and characterization of silicon vibration sensors with linear tunable band selectivityconference paper