Deposition of titanium dioxide by high-rate, ion-assisted electron beam evaporation

Schiller, N.N.SchillerKrug, M.M.KrugStraach, S.S.StraachNeumann, M.M.Neumann2022-03-092022-03-092002https://publica.fraunhofer.de/handle/publica/340651en667670620Deposition of titanium dioxide by high-rate, ion-assisted electron beam evaporationconference paper