Kluge, S.S.KlugeWoias, P.P.WoiasPaneva, R.R.PanevaHermes, T.T.HermesTemmel, G.G.Temmel2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/326533In this contribution, a novel micromachined compact system for liquid dosage and nebulization is presented, which has been developed for anaesthetic applications. The present knowledge about anaesthetics indicates that a precise supply of different anaesthetics is required during surgical treatments. The micro system developed for this purpose combines two elements realized by silicon micro machining: a micro diaphragm pump for precise dosage and a micro nebulizer for fog generation. The system is characterized by a low power consumption (about 0.3 W) and a low weight (below 10 g).enliquid dosing systemmicro pumpmicrosystemnebulizationconference paper