Wilbrandt, SteffenSteffenWilbrandtStenzel, OlafOlafStenzelNakamura, HiroshiHiroshiNakamuraKaiser, NorbertNorbertKaiser2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/38113110.1364/OIC.2013.FC.6Aluminum layers protected with fluoride coatings have been deposited and characterized with respect to their suitability as VUV mirrors. Particularly protection with Aluminum fluoride results in superior VUV reflection properties.en620conference paper