Holzberger, SimonSimonHolzbergerPupeza, IoachimIoachimPupezaEsser, DominikDominikEsserWeitenberg, JohannesJohannesWeitenbergCarstens, HenningHenningCarstensEidam, TinoTinoEidamRussbüldt, PeterPeterRussbüldtLimpert, JensJensLimpertUdem, ThomasThomasUdemTünnermann, AndreasAndreasTünnermannHänsch, TheodorTheodorHänschKrausz, FerencFerencKrauszFill, ErnstErnstFill2022-03-042022-03-042012https://publica.fraunhofer.de/handle/publica/229167We demonstrate efficient output coupling of high harmonics generated in a high-power femtosecond 78-MHz enhancement cavity through an on-axis opening in a mirror. Radiation down to 23 nm (harmonic order 45) is observed.en620621Sub-25 nm high-harmonic generation with a 78-MHz repetition rate enhancement cavityjournal article