Weck, ManfredManfredWeckDay, MarkusMarkusDay2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/328563Linear motors experience an increasing spread in many fields of engineering. In contrast to conventionell feed drives they offer a lot of advantages, such as high dynamics, low friction and simple design. But linear motors are also well suited for ultraprecision purposes, which was tested at the Fraunhofer IPT and will be introduced in this paper.enLinearmotor670658Linear motors in ultra-precision machinesconference paper