On the use of Si-based nanohole arrays as near-field biochips

Eberle, H.-G.H.-G.EberleDressler, C.C.DresslerOertel, H.H.OertelBeuthan, J.J.BeuthanMüller, G.G.Müller2022-03-032022-03-032002https://publica.fraunhofer.de/handle/publica/20126310.1070/QE2002v032n11ABEH002335Near-field biochips based on nanohole arrays produced in silicon wafers are described and the first studies of cells and DNA with the help of a laser scanning microscope are presented.en621On the use of Si-based nanohole arrays as near-field biochipsjournal article