Uhlmann, E.E.UhlmannRöhner, M.M.RöhnerLangmack, M.M.Langmack2022-03-042022-03-042010https://publica.fraunhofer.de/handle/publica/22370310.1016/B978-0-8155-1545-6.00003-Xen658670Micro-EDMbook article