Kübel, C.C.KübelKujawa, M.M.KujawaLuo, J.-S.J.-S.LuoLo, H.M.H.M.LoRussel, J.D.J.D.Russel2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/35330110.1063/1.2173554en620660671Application of electron tomography for semiconductor device analysisconference paper