Plasma-activated high-rate evaporation using a low-voltage EB system

Schiller, S.S.SchillerHötzsch, G.G.HötzschNeumann, M.M.NeumannMorgner, H.H.MorgnerZywitzki, O.O.Zywitzki2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/322957en667670620Plasma-activated high-rate evaporation using a low-voltage EB systemconference paper