Helke, ChristianChristianHelkeHiller, KarlaKarlaHillerSeiler, JanJanSeilerErben, J.J.ErbenWerner, ThomasThomasWernerReuter, DannyDannyReuterMeinig, MarcoMarcoMeinigKurth, SteffenSteffenKurthOtto, ThomasThomasOtto2022-03-142022-03-142019https://publica.fraunhofer.de/handle/publica/40572610.1109/TRANSDUCERS.2019.88084192-s2.0-85071942295This contribution presents a Fabry-Pérot Interferometer (FPI) for the visible spectral range from 555 nm to 585 nm. Two approaches for the FPI reflectors are investigated: a (TiO 2 /PE-SiO 2 ) 3 Bragg reflector consisting of 55 nm TiO 2 and 97 nm PE-SiO 2 layers on 210 nm thin LP-Si 3 N 4 membranes as well as a 50 nm thin Al subwavelength grating (SWG) reflector with 140 nm structure dimension and 200 nm structure pitch on 150 nm thin LP-Si 3 N 4 membranes. Reflectance is up to 97 % realizing an FPI with peak transmittance up to 40 %, a full width half maximum (FWHM) bandwidth of 1.8 nm and a free spectral range (FSR) of 30 nm.enconference paper