Grimme, R.R.GrimmeLawrenz, W.W.LawrenzWillmann, J.J.WillmannSchwaab, G.G.Schwaab2022-03-082022-03-082001https://publica.fraunhofer.de/handle/publica/304883NOVELTY - Delivery openings (9) of the gas delivery unit for washing the plasma cloud (15) due to the laser beam are directed onto the region (14) of the laser spot. Suction with the suction unit (1) takes place in the opposite direction to the direction of the laser beam. A directed stream of inert gas is produced for underwashing the plasma cloud forming in the region (14). USE - In laser installations for material treatment and cleaning. ADVANTAGE - Dispersal of the products resulting from application of the laser beam is prevented directly at the spot of their generation. The highest requirements concerning surface cleanliness are satisfied.de608670patent1997-19747841