Preparation of amorphous and nanocrystalline tetrahedral carbon by fullerene plasma deposition

Brauneck, U.U.BrauneckDavid, H.-W.H.-W.DavidDiekhoff, S.S.DiekhoffBusmann, H.G.H.G.Busmann2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/328884en620660671Preparation of amorphous and nanocrystalline tetrahedral carbon by fullerene plasma depositionconference paper