MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine

Kim, Y.Y.KimParala, H.H.ParalaBauer, A.J.A.J.BauerLemberger, M.M.LembergerBaunemann, A.A.BaunemannFischer, R.A.R.A.Fischer2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/347571en670620530MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazineconference paper