DTIP of MEMS & MOEMS : design, test, integration and packaging of MEMS/MOEMS 2006

Blanton, S.2022-03-022022-03-0220062-916187-03-0https://publica.fraunhofer.de/handle/publica/144591DTIP of MEMS & MOEMS : design, test, integration and packaging of MEMS/MOEMS 2006