Haase, N.N.Haase2022-03-092022-03-091995https://publica.fraunhofer.de/handle/publica/324467The properties of an integrated optical quadruple interferometer for destination of the concentration or the refractive index of liquids are discussed. this sensor was designed to measure the refractive index of several liquids in the range from 1,33 to 1,46. This sensor is fabricated in a SiO2-SiOxNy-SiO2 sandwich layer technology on Si-wafer at a wavelength of 633nm (HeNe laser) on a chip area of 17x2mm². This paper gives a first report on the realization and the sensor properties.deBrechzahlmessungintegrierte OptikIntegrierte SensorikinterferometerInterferometrie621conference paper