Benecke, W.W.Benecke2022-03-082022-03-081994https://publica.fraunhofer.de/handle/publica/302986The description relates to a micromechanical manipulator comprising a substrate 1, heating elements and a manipulator arm 2, which is based on the bimaterial effect principle. Known bimaterial manipulators perform movements perpendicular to the substrate surface. However, it is frequently desirable to have a manipulator which performs movements along the plane of the substrate surface. The manipulator according to the invention is based on the fact that the substrate surface generates a mechanical resistance to the deflection of the manipulator arm, causing a warpage and a shortening of the effective length of the arm and thus to a movement in the plane of the substrate surface. The manipulator arm according to the invention is suitable for use as the drive for movable elements arranged in the plane of the substrate such as cogwheels or joints.de608621patent1988-3841557