Richter, M.M.RichterKluge, S.S.Kluge2022-03-082022-03-082003https://publica.fraunhofer.de/handle/publica/305759A micro-valve (50a,50b) controls a fluid flow and consists of a valve flap (52) operated by electro-static force and covering a number of esp. laser-drilled perforations (56) in a plate (54). The thickness of the plate (54) sections between adjacent perforations (56) is reduced in comparison to the thickness of the surrounding material. The rim of each perforation (56) directed towards the valve flap (52) bears a surrounding lip (64). The valve flap (52) has a series of perforations (66) which admit fluid in the open position, and close the plate perforations (56) in the closed position. ADVANTAGE - The valve passes a greater volume of fluid than micro-valves of prior art. Pneumatic forces exerted by the fluid on the flap can be ignored during operation. The valve can be operated in both directions.de608621patent1996-19637945