Mechanical characterization of poly-silicon membranes by efficient experimental tests and numerical simulations

Brückner, J.J.BrücknerAuerswald, E.E.AuerswaldVogel, D.D.VogelDudek, RainerRainerDudekRzepka, SvenSvenRzepkaDehe, A.A.Dehe2022-03-132022-03-132015https://publica.fraunhofer.de/handle/publica/3909902-s2.0-84976320715enMechanical characterization of poly-silicon membranes by efficient experimental tests and numerical simulationsconference paper