Structure, properties and applications for PVD Al2O3 layers - a comparison of deposition technologies

Hoetzsch, G.G.HoetzschZywitzki, O.O.ZywitzkiSahm, H.H.Sahm2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/329105en667670620Structure, properties and applications for PVD Al2O3 layers - a comparison of deposition technologiesconference paper