Eberhardt, R.R.EberhardtMohaupt, M.M.MohauptScheller, T.T.Scheller2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/335220During the last years micro-optical and opto-electronic systems are in instrumentation and represent a huge potential for miniaturised systems. In these terms different kinds of microlenses and microparts have been used to achieve the desired optical function. One of the most critical obstacles achieving a cost-effective solution of the assembly is the integration of an alignment and positioning process within tolerances of few microns.enmicroassemblymicroopticsalignmenthybrid integration620conference paper