Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching

Gottmann, J.J.GottmannWortmann, D.D.WortmannHörstmann-Jungemann, M.M.Hörstmann-Jungemann2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/21805110.1016/j.apsusc.2008.10.097en621669Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etchingjournal article