Lisec, T.T.LisecHoerschelmann, S.S.HoerschelmannQuenzer, H.J.H.J.QuenzerWagner, B.B.WagnerBenecke, W.W.Benecke2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/32321410.1109/MEMSYS.1994.555590en621Thermally driven microvalve with buckling behaviour of pneumatic applicationsconference paper