Impact of layer thickness variations of SOI-wafer on ESD-robustness

Graf, M.M.GrafDietz, F.F.DietzDudek, V.V.DudekBychikhin, S.S.BychikhinPogany, D.D.PoganyGornik, E.E.GornikSoppa, W.W.SoppaWolf, H.H.Wolf2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/342105en621Impact of layer thickness variations of SOI-wafer on ESD-robustnessconference paper