Samlenski, R.R.SamlenskiHaug, C.C.HaugDelto, R.R.DeltoWild, C.C.WildBrenn, R.R.Brenn2022-03-032022-03-032002https://publica.fraunhofer.de/handle/publica/20215010.1016/S0168-583X(02)00454-82-s2.0-0036570176The incorporation of hydrogen in thick polycrystalline chemical vapour deposition diamond plates has been studied by elastic recoil detection with a 2.8 MeV He+ microbeam. Hydrogen-rich inclusions of lateral dimensions 50-100 µm have been found and analysed quantitatively by depth resolved hydrogen area maps and line scans. The laterally averaged hydrogen content and its depth profile were also characterized by the 1H(15N, Alpha Gamma)12C reaction. The observed hydrogen-rich inclusions correlate with features visible in optical microscopy but not with the optically visible crystallite topography.enCVD-DiamondCVD-DiamanthydrogenWasserstoffnuclear microprobenukleare Mikroanalyseion beam analysisIonenstrahlanalyse621667539journal article