Netzelmann, U.U.NetzelmannWalle, G.G.WalleKarpen, W.W.KarpenMeyendorf, N.N.Meyendorf2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/335631Microstructures in semiconductors and in ferrite were imaged by pulsed thermography and by thermal wave microscopy. The lateral resolution ranges down to 50 µm for thermoagraphy and 5 µm respectively. The advantage of both techniques is their contact-free operation with ability to obtain sub-surface information.ennondestructive testingthermal wavethermographywafer620658670conference paper