Reiter, K.H.K.H.ReiterLähn, J.J.LähnBundgaard, H.H.Bundgaard2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/35060610.1109/IPFA.2005.1469167The TargetSystem has been described and preparation methods for achieving good sample surfaces were developed. The TargetSystem is suitable for metallographic failure analysis of electronic and microelectronic components. The desired preparation planes of several similar samples were reached precisely and the process was reproducible. To manually prepare these samples with good quality surfaces is difficult and time consuming and can only be done by experienced metallographers. In manual preparation there is always a risk of grinding past the target after which the specimen is irrevocably lost. After an introduction and a brief training period, it is possible to prepare difficult samples with the TargetSystem within short time, with high precision and good reproducibility.en621conference paper