Leistner, HenryHenryLeistnerAnheuer, DanielDanielAnheuerBosetti, GabrieleGabrieleBosettiSchrag, GabrieleGabrieleSchragRichter, MartinMartinRichter2022-10-212022-10-212022-02-01https://publica.fraunhofer.de/handle/publica/427796This work constitutes towards a bubble tolerant electrostatic micropump. One key task in this respect is the development of the actuator unit. Specifically, a model is derived utilizing an analytical compact model and comparing it to a numerical continuous-field and a system-level approach, whereby the model allows the estimation of operating voltages, stroke volumes and blocking-pressures of a perspective micropump. Finally, the manufacturing as well as an initial characterization of the actuator unit is presented, enabling the realization of an electrostatically driven micropump.enconference paper