Under CopyrightSpoldi, G.G.SpoldiBeuer, SusanneSusanneBeuerRommel, MathiasMathiasRommelYanev, V.V.YanevBauer, A.J.A.J.BauerRyssel, H.H.Ryssel2023-09-182023-09-182008https://publica.fraunhofer.de/handle/publica/36016910.24406/publica-fhg-360169enfocused ion beamion implantation damagescanning capacitance microscopyscanning spreading resistance microscopy670620530Experimental observation of FIB induced lateral damage on silicon samplesposter