A new approach for handling and transferring of thin semiconductor materials

Bagdahn, J.J.BagdahnKatzer, D.D.KatzerPetzold, M.M.PetzoldWiemer, M.M.WiemerAlexe, M.M.AlexeDragoi, V.V.DragoiGösele, U.U.Gösele2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/338611en531620A new approach for handling and transferring of thin semiconductor materialsconference paper