Schenk, H.H.SchenkSandner, T.T.SandnerLakner, H.H.Lakner2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/347575Micro Scanning Mirrors for light deflection and large scale integrated Micro Mirror Arrays for light modulation were designed and fabricated. Single mirrors, resonantly respectively quasistatically operated are used for applications like barcode reading, laser projection displays, spectroscopy and laser beam positioning. A basic process with various options allows fabricating devices meeting the application specific requirements. E. g. high reflective coatings or gratings can be realized. Key properties of the devices are low driving voltage, high shock resistivity and excellent long run behaviour. Large scale integrated Micro Mirror Arrays with up to 1 million individually addressable pixels serve as high dynamic programmable mask in DUV-microlithography as well as for wave front correction applications. Frame rates of up to 2 kHz are achieved with 63 grey levels.en621conference paper