Under CopyrightNaffin, F.F.NaffinErnst, C.C.ErnstFode, P.P.Fode2022-03-0304.10.19991998https://publica.fraunhofer.de/handle/publica/19203310.24406/publica-fhg-192033Particle contamination has a decisive influence on production success and is therefore an important focal point in the monitoring of "clean" productions. In order to control contamination, data has to be recorded, evaluated in a defined way and be further processed. Modern measurement software can be extremely useful, provided that it integrates the individual process steps and gives the user a flexible evaluation of his raw data adapted to his requirements.The Fraunhofer Institute for Manufacturing Engineering and Automation in Stuttgart has developed an integrated software package which offers a holistic solution, even to complex contamination tests.encleanroomcontaminationdata aquisitiondata processingevaluationmeasurementmonitoringparticleprocess controlquality controlsoftware670journal article