Revealing Copper Contamination in Silicon after Low Temperature Treatments

Polignano, M.M.PolignanoBrivio, J.J.BrivioCodegoni, D.D.CodegoniGrasso, S.S.GrassoAltmann, R.R.AltmannNutsch, A.A.NutschPavia, G.G.Pavia2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/36503910.1149/1.3204424en670620530Revealing Copper Contamination in Silicon after Low Temperature Treatmentsconference paper