Biehl, S.S.BiehlLüthje, H.H.Lüthje2022-03-102022-03-102004https://publica.fraunhofer.de/handle/publica/345490This paper deals with the farbrication of novel sensorintegrated ball bearings for direct measurement of the current surface temperature and the load of the individual balls and their distribution during operation. This was performed by nanostructured amorphous carbon films for force detection and ultra thin thermoresistive films. Microstructuring was done by laser or lithographic processes.enmicrosensorbearingstructurestructuring667conference paper