Riethmüller, W.W.RiethmüllerWenk, B.B.WenkDudde, R.R.DuddeClerc, J.F.J.F.Clerc2022-03-092022-03-091998https://publica.fraunhofer.de/handle/publica/330425Microsystems are today key components for many industrial, consumer and medical products and systems, and their necessesity for the realisation of competetive products in various market segments is growing continously. MST or MEMS is on the way to be a multi-billion ECU world activity. But R and D and production in Microsystem technology (MST) or MEMS, especially the set up of qualified fabrication processes is costly and time consumingen621conference paper