Bramlage, BernhardBernhardBramlageErnst, DörtheDörtheErnstGebhardt, SylviaSylviaGebhardt2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/385688enPZTthick filmactuatorAl2O3620666Monolithic micro-positioning stage on piezo thick film technologyconference paper