Roscher, FrankFrankRoscherBaum, MarioMarioBaumGebhardt, C.C.GebhardtRaukopf, S.S.RaukopfWiemer, MaikMaikWiemerGeßner, ThomasThomasGeßner2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/375185enSi interposer technologies for three dimensional sensor systemsconference paper