Brecher, ChristianChristianBrecherWeinzierl, MartinMartinWeinzierlLange, S.C.S.C.Lange2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/35293610.1007/0-387-31277-3_18Conventional machining methods have been developed to meet the standards of ultra precision machining. Special milling processes utilizing mono-crystalline diamond tools, the so-called fly-cutting processes, are used successfully to manufacture highly precise microstructures with an optical surface finish. In micro assembly often positioning accuracies of only a few micro meters are needed. An approach of the Fraunhofer IPT is to achieve these accuracies using passive alignment strategies. In this paper, the ultra precision machining of the v-groove structures as well as their passive alignment capacities for micro assembly tasks are presented.enmicrosystemmicrotechnologyMikrosystemtechnikMontageUltrapräzisionsmaschine658670conference paper