Gehner, A.A.GehnerDürr, P.P.DürrKunze, D.D.KunzeRudloff, D.D.RudloffElgner, A.A.ElgnerHeber, J.J.HeberFrancés, S.S.FrancésSkupsch, C.C.SkupschTorlee, H.H.TorleeEckert, M.M.EckertFriedrichs, M.M.FriedrichsSchmidt, J.J.SchmidtPufe, W.W.PufeDöring, S.S.DöringHohle, C.C.HohleSchulze, M.M.SchulzeWagner, M.M.Wagner2022-03-142022-03-142018https://publica.fraunhofer.de/handle/publica/40355110.1109/OMN.2018.8454624We have developed a novel 512 × 320 micro mirror array consisting of 2axis-tip-tilt actuators with 48mm pixel size, allowing a continuous, pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable with standard deviations of better than 0.025°. The device is realized in a fully CMOS compatible process with an underlying integrated address circuitry.en621conference paper