Hinkov, V.V.HinkovEggert, E.E.Eggert2022-03-082022-03-082007https://publica.fraunhofer.de/handle/publica/308127(A1) Die vorliegende Erfindung betrifft einen piezoelektrischen Sensor mit einem monokristallinen Schwingkoerper aus einem piezoelektrischen Material, in dem ein domaeneninvertierter Bereich mit invertierten Kristallachsen ausgebildet ist, wobei der Schwingkoerper mit Anregungs- und Aufnahmeelektroden verbunden ist.DE 102007009907 A1 UPAB: 20080925 NOVELTY - The piezoelectric sensor has a mono crystalline vibrating body (1) from a piezoelectric material, in which a domain-inverted area is formed with inverted crystal axis. The vibrating body is connected with excitation electrodes (4) and receiving electrodes (3), which are arranged along a part of a longitudinal extension of the vibrating body. The vibrating body is formed as longitudinal extending plate with a rectangular base or as plate with circular base. The domain-inverted area is formed as layer in the cross section of the vibrating body. USE - Piezoelectric sensor. ADVANTAGE - The piezoelectric sensor has a mono crystalline vibrating body from a piezoelectric material, in which a domain-inverted area is formed with inverted crystal axis, where the vibrating body is connected with excitation electrodes and receiving electrodes, which are arranged along a part of a longitudinal extension of the vibrating body, and hence enables manufacturing of piezoelectric sensor in an economical manner.de621patent102007009907