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Gettering and defect engineering in semiconductor technology XI, GADEST 2005
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Title
Gettering and defect engineering in semiconductor technology XI, GADEST 2005
Titel Supplements
Proceedings of the 11th international autumn meeting, Giens (close to Marseilles), France, September 25-30, 2005
Verlag
Trans Tech Publications
Verlagsort
Uetikon-Zurich
Datum
2005
Serie
Diffusion and defect data. B, Solid state phenomena
Konferenz
International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology (GADEST) 2005