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Design, Test, Integration and Packaging of MEMS/MOEMS
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Title
Design, Test, Integration and Packaging of MEMS/MOEMS
Titel Supplements
Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, 25 - 27 April 2007, Stresa, Lago Maggiore, Italy
Institut
IEEE Components, Packaging, and Manufacturing Technology Society
Institute of Electrical and Electronics Engineers -IEEE-
Verlag
EDA Publishing
Verlagsort
Grenoble
Datum
2007
Konferenz
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2007