Title

ASMC 2003, the 14th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. Proceedings

Title Supplement

Advancing the science of semiconductor manufacturing excellence

Person Involved

Corporate Author

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Institute of Electrical and Electronics Engineers -IEEE-

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2003

ISBN

0-7803-7673-0

Conference