Title

Microprocesses and nanotechnology 2001. Digest of papers
Titel Supplements
2001 International Microprocesses and Nanotechnology Conference, October 31 - November 2, 2001, Matsue-shi, Shimane, Japan
Institut
Japan Society of Applied Physics -JSAP-
IEEE Electron Devices Society
Verlag
Verlagsort
Tokyo
Datum
2001
ISBN
4-89114-017-8
Konferenz