Synchronal pulsed RF superimposed DC sputtering of aluminium doped zinc oxide (ZnO:Al)

2010

Author(s)

Heimke, B.

Hartung, U.

Kopte, T.

Junghähnel, M.

Nyderle, R.

Hauptwerk

8th International Conference on Coatings on Glass and Plastics, ICCG 2010. Advanced Coatings for Large Area or High-Volume Products. Proceedings

Konferenz