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Konferenzschrift
Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication
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2008
Konferenzbeitrag
Titel
Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication
Author(s)
Niebelschütz, F.
Pezoldt, J.
Stauden, T.
Cimalla, V.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Tonisch, K.
Brueckner, K.
Hein, M.
Ambacher, O.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Schober, A.
Hauptwerk
COMMAD 2008, Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings
Konferenz
Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) 2008
International Conference on Electronic Materials (ICEM) 2008
DOI
10.1109/COMMAD.2008.4802084
Language
Englisch
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