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Konferenzschrift
Laser annealing of power devices
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2007
Konferenzbeitrag
Titel
Laser annealing of power devices
Author(s)
Friedrich, D.
Bernt, H.
Hanssen, H.
Oesterlin, P.
Schmidt, H.
Hauptwerk
15th IEEE International Conference on Advanced Thermal Processing of Semiconductors 2007
Konferenz
International Conference on Advanced Thermal Processing of Semiconductors (RTP) 2007
DOI
10.1109/RTP.2007.4383852
Language
Englisch
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