Exploring potentials of the shop floor IT landscape for thin film manufacturing

Using suitable IT concepts and tools there are a number of potentials to be exploited in Thin-Film manufacturing. Based on the definition of the shop floor IT landscape, including major goals and a generic architecture, three major pillars of an open, agile MES framework are discussed in more detail. Standardization greatly simplifies the task of deploying such an MES system into a real-world thin-film production line. The approach to standardization is described using the example of the IT equipment interface for photovoltaic manufacturing, which is currently being generated by a task force within SEMI. In order to make best use of such an equipment interface standard for building new or for extending existing production lines, suitable processes and software tools are required. An automation capability management approach as known from semiconductor manufacturing is expected to bridge this gap.